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e / 11815 / e 1/13 lde series digital low differential pressure sensors www.first-sensor.com www.sensortechnics.com features pressure ranges from 25 to 500 pa (0.1 to 2 inh 2 o) pressure sensor based on thermal micro-flow measurement high flow impedance very low flow-through leakage high immunity to dust and humidity no loss in sensitivity using long tubing calibrated and temperature compensated unique offset autozeroing feature ensuring superb long-term stability offset accuracy better than 0.2 %fs total accuracy better than 0.5 %fs typical on-chip temperature sensor analog output and digital spi interface rohs and reach compliant quality management system according to en iso 13485 and en iso 9001 electrical connection 3 media compatibility air and other non-corrosive gases specifications maximum ratings supply voltage v s lde...3... 2.70 ... 3.60 v dc lde...6... 4.75 ... 5.25 v dc output current 1 ma lead specifications average preheating temperature gradient 2.5 k/s soak time ca. 3 min time above 217 c 50 s time above 230 c 40 s time above 250 c 15 s peak temperature 260 c cooling temperature gradient -3.5 k/s temperature ranges compensated 0 ... +70 c operating -20 ... +80 c storage -40 ... +80 c humidity limits (non-condensing) 97 %rh vibration 1 20 g mechanical shock 2 500 g 10 9 8 7 6 1 2 3 4 5 specification notes: 1. sweep 20 to 2000 hz, 8 min, 4 cycles per axis, mil-std-883, method 2007. 2. 5 shocks, 3 axes, mil-std-883e, method 2002.4. 3. the maximum voltage applied to pin 1 and pins 6 through 10 should not exceed v s +0.3 v. there are three use cases that will change the manner in which the lde sensor is connected in-circuit. for detailed pin connections see page 12. n i pn o i t c n u f 1d e v r e s e r 2v s 3d n g 4t u o v 5t u o v 6k l c s 7i s o m 8o s i m 9s c / 0 1d e v r e s e r t op-down view
e / 11815 / e 2/13 lde series digital low differential pressure sensors www.first-sensor.com www.sensortechnics.com pressure sensor characteristics . o n t r a pe r u s s e r p g n i t a r e p oe r u s s e r p f o o r p 4 e r u s s e r p t s r u b 4 . . . u 5 2 0 s e d la p 5 2 . . . 0/ r a b m 5 2 . 0 . . . 0h n i 1 . 0 ( 2 ) o r a b 2 ) i s p 0 3 ( r a b 5 ) i s p 5 7 ( . . . u 0 5 0 s e d la p 0 5 . . . 0/ r a b m 5 . 0 . . . 0h n i 2 . 0 ( 2 ) o . . . u 0 0 1 s e d la p 0 0 1 . . . 0/r a b m 1 . . . 0h n i 4 . 0 ( 2 ) o . . . u 0 5 2 s e d la p 0 5 2 . . . 0/ r a b m 5 . 2 . . . 0h n i 1 ( 2 ) o . . . u 0 0 5 s e d la p 0 0 5 . . . 0/r a b m 5 . . . 0h n i 2 ( 2 ) o . . . b 5 2 0 s e d la p 5 2 . . . 0/ r a b m 5 2 . 0 . . . 0h n i 1 . 0 ( 2 ) o . . . b 0 5 0 s e d la p 0 5 . . . 0/ r a b m 5 . 0 . . . 0h n i 2 . 0 ( 2 ) o . . . b 0 0 1 s e d la p 0 0 1 . . . 0/ r a b m 1 . . . 0h n i 4 . 0 ( 2 ) o . . . b 0 5 2 s e d la p 0 5 2 . . . 0/ r a b m 5 . 2 . . . 0h n i 1 ( 2 ) o . . . b 0 0 5 s e d la p 0 0 5 . . . 0/ r a b m 5 . . . 0h n i 2 ( 2 ) o specification notes: 4. the max. common mode pressure is 5 bar. 5. for example with a ldes500... sensor measuring co 2 gas, at full-scale output the actual pressure will be 500 pa x 0.56 = 280 pa. facto r correction gas p p sensor eff = p eff = true differential pressure p sensor = differential pressure as indicated by output voltage e p y t s a gr o t c a f n o i t c e r r o c r i a y r d0 . 1 o ( n e g y x o 2 )7 0 . 1 n ( n e g o r t i n 2 )7 9 . 0 ) r a ( n o g r a8 9 . 0 o c ( e d i x o i d n o b r a c 2 )6 5 . 0 gas correction factors 5
e / 11815 / e 3/13 lde series digital low differential pressure sensors www.first-sensor.com www.sensortechnics.com s c i t s i r e t c a r a h c. n i m. p y t. x a mt i n u ) s m r ( l e v e l e s i o n1 0 . 0 a p t f i h s p u - m r a w t e s f f o e s i o n n a h t s s e l y t i l i b a t s m r e t g n o l t e s f f o 7 5 0 . 0 1 . 0 r a e y / a p y t i l i b a t a e p e r t e s f f o1 0 . 0 a p y t i l i b a t a e p e r n a p s 1 1 , 0 1 5 2 . 0 g n i d a e r f o % ) d a o l o n ( n o i t p m u s n o c t n e r r u c 8 78a m t ( e m i t e s n o p s e r 3 6 )5 s m e m i t n o - r e w o p 5 2 analog output (unidirectional devices) s c i t s i r e t c a r a h c. n i m. p y t. x a mt i n u t e s f f o e r u s s e r p o r e z9 4 . 00 5 . 01 5 . 0 v t u p t u o e l a c s l l u f 0 5 . 4 y c a r u c c a n a p s 1 1 , 0 1 4 . 0 5 7 . 0 g n i d a e r f o % s t c e f f e l a m r e h tt e s f f oc 5 5 . . . 55 1 v m c 0 7 . . . 00 3 n a p sc 5 5 . . . 55 2 . 1 2 g n i d a e r f o % c 0 7 . . . 02 5 7 . 2 analog output (bidirectional devices) s c i t s i r e t c a r a h c. n i m. p y t. x a mt i n u t e s f f o e r u s s e r p o r e z9 4 . 20 5 . 21 5 . 2 v t u p t u oe r u s s e r p d e i f i c e p s . x a m t a0 5 . 4 e r u s s e r p d e i f i c e p s . n i m t a0 5 . 0 y c a r u c c a n a p s 1 1 , 0 1 4 . 0 5 7 . 0 g n i d a e r f o % s t c e f f e l a m r e h tt e s f f oc 5 5 . . . 55 1 v m c 0 7 . . . 00 3 n a p sc 5 5 . . . 55 2 . 1 2 g n i d a e r f o % c 0 7 . . . 02 5 7 . 2 performance characteristics 6 lde...6... (v s =5.0 v dc , t a =20 c, p abs =1 bara, calibrated in air, output signals analog and digital are non-ratiometric to v s ) all 25 pa and 50 pa devices digital output s c i t s i r e t c a r a h c. n i m. p y t. x a mt i n u r o t c a f e l a c s) t u p t u o l a t i g i d ( 9 . . . 0 / 5 2 . . . 0a p 5 2 0 0 2 1 a p / s t n u o c . . . 0 / 0 5 . . . 0a p 0 5 0 0 6 y c a r u c c a t e s f f o e r u s s e r p o r e z 0 1 1 . 0 2 . 0 s s f % y c a r u c c a n a p s 1 1 , 0 1 4 . 0 5 7 . 0 g n i d a e r f o % s t c e f f e l a m r e h tt e s f f oc 5 5 . . . 52 . 0 s s f % c 0 7 . . . 04 . 0 n a p sc 5 5 . . . 51 5 7 . 1 g n i d a e r f o % c 0 7 . . . 02 5 7 . 2
e / 11815 / e 4/13 lde series digital low differential pressure sensors www.first-sensor.com www.sensortechnics.com performance characteristics 6 lde...6... (v s =5.0 v dc , t a =20 c, p abs =1 bara, calibrated in air, output signals analog and digital are non-ratiometric to v s ) all 100 pa, 250 pa and 500 pa devices s c i t s i r e t c a r a h c. n i m. p y t. x a mt i n u ) s m r ( l e v e l e s i o n1 0 . 0 s s f % t f i h s p u - m r a w t e s f f o e s i o n n a h t s s e l y t i l i b a t s m r e t g n o l t e s f f o 7 5 0 . 0 1 . 0 r a e y / s s f % y t i l i b a t a e p e r t e s f f o 2 1 2 0 . 0 a p y t i l i b a t a e p e r n a p s 1 1 , 0 1 5 2 . 0 g n i d a e r f o % ) d a o l o n ( n o i t p m u s n o c t n e r r u c 8 78a m t ( e m i t e s n o p s e r 3 6 )5 s m e m i t n o - r e w o p 5 2 analog output (unidirectional devices) s c i t s i r e t c a r a h c. n i m. p y t. x a mt i n u t e s f f o e r u s s e r p o r e z9 4 . 00 5 . 01 5 . 0 v t u p t u o e l a c s l l u f 0 5 . 4 y c a r u c c a n a p s 1 1 , 0 1 4 . 0 5 7 . 0 g n i d a e r f o % s t c e f f e l a m r e h tt e s f f oc 5 5 . . . 50 1 v m c 0 7 . . . 02 1 n a p sc 5 5 . . . 51 5 7 . 1 g n i d a e r f o % c 0 7 . . . 02 5 7 . 2 analog output (bidirectional devices) s c i t s i r e t c a r a h c. n i m. p y t. x a mt i n u t e s f f o e r u s s e r p o r e z9 4 . 20 5 . 21 5 . 2 v t u p t u oe r u s s e r p d e i f i c e p s . x a m t a0 5 . 4 e r u s s e r p d e i f i c e p s . n i m t a0 5 . 0 y c a r u c c a n a p s 1 1 , 0 1 4 . 0 5 7 . 0 g n i d a e r f o % s t c e f f e l a m r e h tt e s f f oc 5 5 . . . 50 1 v m c 0 7 . . . 02 1 n a p sc 5 5 . . . 51 5 7 . 1 g n i d a e r f o % c 0 7 . . . 02 5 7 . 2 digital output s c i t s i r e t c a r a h c. n i m. p y t. x a mt i n u r o t c a f e l a c s) t u p t u o l a t i g i d ( 9 . . . 0 / 0 0 1 . . . 0a p 0 0 1 0 0 3 a p / s t n u o c . . . 0 / 0 5 2 . . . 0a p 0 5 2 0 2 1 . . . 0 / 0 0 5 . . . 0a p 0 0 5 0 6 y c a r u c c a t e s f f o e r u s s e r p o r e z 0 1 5 0 . 0 1 . 0 s s f % y c a r u c c a n a p s 1 1 , 0 1 4 . 0 5 7 . 0 g n i d a e r f o % s t c e f f e l a m r e h tt e s f f oc 5 5 . . . 51 . 0 s s f % c 0 7 . . . 02 . 0 n a p sc 5 5 . . . 51 5 7 . 1 g n i d a e r f o % c 0 7 . . . 02 5 7 . 2
e / 11815 / e 5/13 lde series digital low differential pressure sensors www.first-sensor.com www.sensortechnics.com performance characteristics 6 lde...3... (v s =3.0 v dc , t a =20 c, p abs =1 bara, calibrated in air, output signals analog and digital are non-ratiometric to v s ) all 25 pa and 50 pa devices s c i t s i r e t c a r a h c. n i m. p y t. x a mt i n u ) s m r ( l e v e l e s i o n1 0 . 0 a p t f i h s p u - m r a w t e s f f o e s i o n n a h t s s e l y t i l i b a t s m r e t g n o l t e s f f o 7 5 0 . 0 1 . 0 r a e y / a p y t i l i b a t a e p e r t e s f f o1 0 . 0 a p y t i l i b a t a e p e r n a p s 1 1 , 0 1 5 2 . 0 g n i d a e r f o % ) d a o l o n ( n o i t p m u s n o c t n e r r u c 8 4 16 1a m t ( e m i t e s n o p s e r 3 6 )5 s m e m i t n o - r e w o p 5 2 analog output (unidirectional devices) analog output (bidirectional devices) s c i t s i r e t c a r a h c. n i m. p y t. x a mt i n u t e s f f o e r u s s e r p o r e z9 4 . 10 5 . 11 5 . 1 v t u p t u oe r u s s e r p d e i f i c e p s . x a m t a0 7 . 2 e r u s s e r p d e i f i c e p s . n i m t a0 3 . 0 y c a r u c c a n a p s 1 1 , 0 1 4 . 0 5 7 . 0 g n i d a e r f o % s t c e f f e l a m r e h tt e s f f oc 5 5 . . . 55 1 v m c 0 7 . . . 00 3 n a p sc 5 5 . . . 55 2 . 1 2 g n i d a e r f o % c 0 7 . . . 02 5 7 . 2 digital output s c i t s i r e t c a r a h c. n i m. p y t. x a mt i n u r o t c a f e l a c s) t u p t u o l a t i g i d ( 9 . . . 0 / 5 2 . . . 0a p 5 2 0 0 2 1 a p / s t n u o c . . . 0 / 0 5 . . . 0a p 0 5 0 0 6 y c a r u c c a t e s f f o e r u s s e r p o r e z 0 1 1 . 0 2 . 0 s s f % y c a r u c c a n a p s 1 1 , 0 1 4 . 0 5 7 . 0 g n i d a e r f o % s t c e f f e l a m r e h tt e s f f oc 5 5 . . . 52 . 0 s s f % c 0 7 . . . 04 . 0 n a p sc 5 5 . . . 51 5 7 . 1 g n i d a e r f o % c 0 7 . . . 02 5 7 . 2 s c i t s i r e t c a r a h c. n i m. p y t. x a mt i n u t e s f f o e r u s s e r p o r e z9 2 . 00 3 . 01 3 . 0 v t u p t u o e l a c s l l u f 0 7 . 2 y c a r u c c a n a p s 1 1 , 0 1 4 . 0 5 7 . 0 g n i d a e r f o % s t c e f f e l a m r e h tt e s f f oc 5 5 . . . 55 1 v m c 0 7 . . . 00 3 n a p sc 5 5 . . . 55 2 . 1 2 g n i d a e r f o % c 0 7 . . . 02 5 7 . 2
e / 11815 / e 6/13 lde series digital low differential pressure sensors www.first-sensor.com www.sensortechnics.com performance characteristics 6 lde...3... (v s =3.0 v dc , t a =20 c, p abs =1 bara, calibrated in air, output signals analog and digital are non-ratiometric to v s ) all 100 pa, 250 pa and 500 pa devices s c i t s i r e t c a r a h c. n i m. p y t. x a mt i n u ) s m r ( l e v e l e s i o n1 0 . 0 s s f % t f i h s p u - m r a w t e s f f o e s i o n n a h t s s e l y t i l i b a t s m r e t g n o l t e s f f o 7 5 0 . 0 1 . 0 r a e y / s s f % y t i l i b a t a e p e r t e s f f o 2 1 2 0 . 0 a p y t i l i b a t a e p e r n a p s 1 1 , 0 1 5 2 . 0 g n i d a e r f o % ) d a o l o n ( n o i t p m u s n o c t n e r r u c 8 4 16 1a m t ( e m i t e s n o p s e r 3 6 )5 s m e m i t n o - r e w o p 5 2 analog output (unidirectional devices) s c i t s i r e t c a r a h c. n i m. p y t. x a mt i n u t e s f f o e r u s s e r p o r e z9 2 . 00 3 . 01 3 . 0 v t u p t u o e l a c s l l u f 0 7 . 2 y c a r u c c a n a p s 1 1 , 0 1 4 . 0 5 7 . 0 g n i d a e r f o % s t c e f f e l a m r e h tt e s f f oc 5 5 . . . 50 1 v m c 0 7 . . . 02 1 n a p sc 5 5 . . . 51 5 7 . 1 g n i d a e r f o % c 0 7 . . . 02 5 7 . 2 analog output (bidirectional devices) s c i t s i r e t c a r a h c. n i m. p y t. x a mt i n u t e s f f o e r u s s e r p o r e z9 4 . 10 5 . 11 5 . 1 v t u p t u oe r u s s e r p d e i f i c e p s . x a m t a0 7 . 2 e r u s s e r p d e i f i c e p s . n i m t a0 3 . 0 y c a r u c c a n a p s 1 1 , 0 1 4 . 0 5 7 . 0 g n i d a e r f o % s t c e f f e l a m r e h tt e s f f oc 5 5 . . . 50 1 v m c 0 7 . . . 02 1 n a p sc 5 5 . . . 51 5 7 . 1 g n i d a e r f o % c 0 7 . . . 02 5 7 . 2 digital output s c i t s i r e t c a r a h c. n i m. p y t. x a mt i n u r o t c a f e l a c s) t u p t u o l a t i g i d ( 9 . . . 0 / 0 0 1 . . . 0a p 0 0 1 0 0 3 a p / s t n u o c . . . 0 / 0 5 2 . . . 0a p 0 5 2 0 2 1 . . . 0 / 0 0 5 . . . 0a p 0 0 5 0 6 y c a r u c c a t e s f f o e r u s s e r p o r e z 0 1 5 0 . 0 1 . 0 s s f % y c a r u c c a n a p s 1 1 , 0 1 4 . 0 5 7 . 0 g n i d a e r f o % s t c e f f e l a m r e h tt e s f f oc 5 5 . . . 51 . 0 s s f % c 0 7 . . . 02 . 0 n a p sc 5 5 . . . 51 5 7 . 1 g n i d a e r f o % c 0 7 . . . 02 5 7 . 2
e / 11815 / e 7/13 lde series digital low differential pressure sensors www.first-sensor.com www.sensortechnics.com total accuracy 13 fig. 1: typical total accuracy plot of 16 lde 50 pa sensors @ 25 c (typical total accuracy better than 0.5 %fs) performance characteristics offset long term stability fig. 2: offset long term stability for lde 250 pa sensors after 10 000 hours @ 85c powered, equivalent to over 43.5 years @ 25 c (better than 2 mv / 0.125 pa) temperature sensor s c i t s i r e t c a r a h c. n i m. p y t. x a mt i n u r o t c a f e l a c s) t u p t u o l a t i g i d (5 9c / s t n u o c y t i r a e n i l - n o n 5 . 0 s f % s i s e r e t s y h 1 . 0
e / 11815 / e 8/13 lde series digital low differential pressure sensors www.first-sensor.com www.sensortechnics.com fig. 3: resistors at both ends of the spi lines spi - serial peripheral interface introduction the lde serial interface is a high-speed synchronous data input and output communication port. the serial interface operates using a standard 4-wire spi bus. the lde device runs in spi mode 0, which requires the clock line sclk to idle low (cpol = 0), and for data to be sampled on the leading clock edge (cpha = 0). figure 5 illustrates this mode of operation. care should be taken to ensure that the sensor is properly connected to the master microcontroller. refer to the manufacturer's datasheet for more information regarding physical connections. application circuit the use of pull-up resistors is generally unnecessary for spi as most master devices are configured for push-pull mode. if pull-up resistors are required for use with 3 v lde devices, however, they should be greater than 50 k . note: it is important to adhere to the communication protocol in order to avoid damage to the sensor. there are, however, some cases where it may be helpful to use 33 series resistors at both ends of the spi lines, as shown in figure 3. signal quality may be further improved by the addition of a buffer as shown in figure 4. these cases include multiple slave devices on the same bus segment, using a master device with limited driving capability and long spi bus lines. if these series resistors are used, they must be physically placed as close as possible to the pins of the master and slave devices. signal control the serial interface is enabled by asserting /cs low. the serial input clock, sclk, is gated internally to begin accepting the input data at mosi, or sending the output data on miso. when /cs rises, the data clocked into mosi is loaded into an internal register. fig. 4: addition of a buffer sclk mosi miso /cs sclk mosi miso /cs sensor 33 33 33 33 33 33 33 33 sclk mosi miso /cs sclk mosi miso /cs sensor 33 33 33 33 33 33 33 33 33 33 33 33 /oe /oe /oe /oe
e / 11815 / e 9/13 lde series digital low differential pressure sensors www.first-sensor.com www.sensortechnics.com data read ? pressure when powered on, the sensor begins to continuously measure pressure. to initiate data transfer from the sensor, the following three unique bytes must be written sequentially, msb first, to the mosi pin (see figure 5): p e t sl a m i c e d a x e hy r a n i bn o i t p i r c s e d 1d 2 x 01 0 1 1 0 1 0 0 b t n e m e r u s a e m e r u s s e r p t n e r r u c l l o p 24 1 x 00 0 1 0 1 0 0 0 br e t s i g e r a t a d o t t l u s e r d n e s 38 9 x 00 0 0 1 1 0 0 1 br e t s i g e r a t a d d a e r the entire 16 bit content of the lde register is then read out on the miso pin, msb first, by applying 16 successive clock pulses to sclk with /cs asserted low. note that the value of the lsb is held at zero for internal signal processing purposes. this is below the noise threshold of the sensor and thus its fixed value does not affect sensor performance and accuracy. from the digital sensor output the actual pressure value can be calculated as follows: [] [] ? ? ? ? ? ?
e / 11815 / e 10/13 lde series digital low differential pressure sensors www.first-sensor.com www.sensortechnics.com interface specification r e t e m a r a pl o b m y ss n o i t i d n o c. n i m. p y t. x a mt i n u y c n e u q e r f k c o l c l a n r e t x e f k l c e v l e s k c 0 = . n i m2 . 0 z h m . x a m5 e m i t w o l t u p n i k c o l c r e t s a m l a n r e t x e f o l n i k l c e t k l c e f / 1 = k l c e 0 40 6 t % k l c e e m i t h g i h t u p n i k c o l c r e t s a m l a n r e t x e f i h n i k l c e t k l c e f / 1 = k l c e 0 40 6 s c / e g d e g n i l l a f o t p u t e s k l c s t c s 0 3 s n e m i t p u t e s e g d e g n i s i r k l c s o t e g d e g n i l l a f s c / t s s c 0 3 e m i t e l d i s c / t i s c f k l c z h m 4 = 5 . 1s y a l e d d i l a v a t a d o t e g d e g n i l l a f k l c s t o d c d a o l f p 5 1 = 0 8 s n e m i t p u t e s e g d e g n i s i r k l c s o t d i l a v a t a d t s d 0 3 e m i t d l o h e g d e g n i s i r k l c s o t d i l a v a t a d t h d 0 3 h t d i w e s l u p h g i h k l c s t h c 0 0 1 h t d i w e s l u p w o l k l c s t l c 0 0 1 e m i t d l o h e g d e g n i s i r k l c s o t e g d e g n i s i r s c / t h s c 0 3 e l b a n e t u p t u o o t e g d e g n i l l a f s c / t v d c d a o l f p 5 1 = 5 2 e l b a s i d t u p t u o o t e g d e g n i s i r s c / t r t c d a o l f p 5 1 = 5 2 ) y l p p u s v 5 ( . . . 6 . . . e d l e c n a t i c a p a c d a o l t u p t u o m u m i x a mc d a o l r d a o l = , 5 5 > n i g r a m e s a h p 0 0 2f p h g i h c i g o l , e g a t l o v t u p n i v h i v 8 . 0 s v s 3 . 0 + v w o l c i g o l , e g a t l o v t u p n i v l i v 2 . 0 s h g i h c i g o l , e g a t l o v t u p t u o v h o r d a o l = v s 1 . 0 - r d a o l k 2 = v s 5 1 . 0 - w o l c i g o l , e g a t l o v t u p t u o v l o r d a o l = 5 . 0 r d a o l k 2 = 2 . 0 ) y l p p u s v 3 ( . . . 3 . . . e d l 5 1 e c n a t i c a p a c d a o l t u p t u o m u m i x a mc d a o l r d a o l k 1 = 5 1f p h g i h c i g o l , e g a t l o v t u p n i v h i v 5 6 . 0 s v s 3 . 0 + v w o l c i g o l , e g a t l o v t u p n i v l i v 5 3 . 0 s h g i h c i g o l , e g a t l o v t u p t u o v h o i o a 0 2 - =v s 4 . 0 - w o l c i g o l , e g a t l o v t u p t u o v l o i o a 0 2 = 4 . 0 fig. 5: timing diagram css t t dv sclk mosi miso /cs t sc t cl ch t t dh t ds do t t tr t csh t csi
e / 11815 / e 11/13 lde series digital low differential pressure sensors www.first-sensor.com www.sensortechnics.com 5.0 17.53 0.15 12.70 0.15 17.70 18.03 ? 2.20 6.26 14.97 7.85 8.95 0.5 5.60 0.2 15.65 16.05 3.0 0.25 0.46 2.54 10.16 5.60 3.10 0.2 1.60 0.2 2.50 10 9 8 7 6 1 2 3 4 5 10.70 high pressure port 5.0 17.53 0.15 12.70 0.15 17.70 18.03 ? 2.20 6.26 15.22 1.43 5.60 0.2 5.08 3.0 0.25 0.51 1.27 2.54 5.60 3.10 0.2 1.60 0.2 2.50 10 9 8 7 6 1 2 3 4 5 10.70 high pressure port 13.85 outline drawing lde...f... ( dip, 2 ports same side) lde...e... ( smd, 2 ports same side) dimensions in mm all tolerances 0.1 mm unless otherwise noted dimensions in mm all tolerances 0.1 mm unless otherwise noted
e / 11815 / e 12/13 lde series digital low differential pressure sensors www.first-sensor.com www.sensortechnics.com electrical connection 3 n i pn o i t c n u f n o i t c e n n o c : 1 e s a c t u p t u o l a n g i s l a t i g i d : 2 e s a c t u p t u o l a n g i s g o l a n a : 3 e s a c t n e m e c a l p e r n i - p o r d a b l ) y l n o e d l v 5 ( 1d e v r e s e rc nc nd n g 2v s v 3 + / v 5 +v 3 + / v 5 +v 5 + 3d n gd n gd n gd n g 4t u o vc n t u p n i g o l a n a e c n a d e p m i - h g i h ) c d a , p m a - p o . g . e ( t u p n i g o l a n a e c n a d e p m i - h g i h ) c d a , p m a - p o . g . e ( 5t u o vc n 6k l c sk l c s e c i v e d r e t s a md n gd n g 7i s o mi s o m e c i v e d r e t s a md n gd n g 8o s i mo s i m e c i v e d r e t s a md n gd n g 9s c /) s c / ( e c i v e d r e t s a mv s d n g 0 1d e v r e s e rc nc nd n g there are three use cases that will change the manner in which the lde series device is connected in-circuit: case 1: reading of pressure measurement as a digital (spi) signal; case 2: reading of pressure measurement as an analog (voltage) signal; and case 3: pin-to-pin compatible drop-in replacement for lba series devices (5 v lde devices only). the connections for each such use case must be made as indicated below. sensor pcb footprint outline drawing dimensions in mm all tolerances 0.1 mm unless otherwise noted
e / 11815 / e 13/13 lde series digital low differential pressure sensors www.first-sensor.com www.sensortechnics.com ordering information s e i r e s e g n a r e r u s s e r p n o i t a r b i l a c g n i s u o h t u p t u o e d a r g s n o i t p oe d l 5 2 0 s a p 5 2 h n i 1 . 0 ( 2 ) o b l a n o i t c e r i d i b e s t r o p 2 , t m s e d i s e m a s 3 , c i r t e m o i t a r - n o n y l p p u s v 3 s h g i h u l a n o i t c e r i d i n u 0 5 0 s a p 0 5 h n i 2 . 0 ( 2 ) o f s t r o p 2 , p i d e d i s e m a s 6 , c i r t e m o i t a r - n o n y l p p u s v 5 0 0 1 s a p 0 0 1 h n i 4 . 0 ( 2 ) o 0 5 2 s a p 0 5 2 h n i 1 ( 2 ) o 0 0 5 s a p 0 0 5 h n i 2 ( 2 ) o : e l p m a x e e d l 0 5 2 s b f 6 s first sensor reserves the right to make changes to any products herein. first sensor does not assume any liability arising out of the application or use of any product or circuit described herein, neither does it convey any license under its patent rights nor the rights of others. specification notes: 6. the sensor is calibrated with a common mode pressure of 1 bar absolute. due to the mass flow based measuring principle, variations in absolute common mode pressure need to be compensated according to the following formula: p eff = true differential pressure abs sensor eff p bara 1 p p = p sensor = differential pressure as indicated by output voltage p abs = current absolute common mode pressure 7. figure based on accelerated lifetime test of 10 000 hours at 85 c biased burn-in. 8. please contact first sensor for low power options. 9. the digital output signal is a signed, two's complement integer. negative pressures will result in a negative output. 10. zero pressure offset accuracy and span accuracy are uncorrelated uncertainties. they can be added according to the principles of error propagation. 11. span accuracy below 10 % of full scale is limited by the intrinsic noise of the sensor. 12. typical value for 250 pa sensors. 13. total accuracy is the combined error from offset and span calibration, non-linearity, repeatability and pressure hysteresis. 14. to be defined by user. the results show deviation in c from the offset calibrated temperature 15. for correct operation of lde?3... devices, the device driving the spi bus must have a minimum drive capability of 2 ma.

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