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 MCP ASSEMBLY
F2223-21SH
This MCP assembly is a suitable detector for an electron or ion beam in SEM, SIM or Lithography. It is possible to detect some signal from a sample with high sensitivity, that can be performed with the compactness and the center hole of this assembly. It allows to set this assembly at close position to the sample and gives better efficiency in the beam detection.
TMCPF0020
FEATURES
GHigh Sensitivity GHigh S/N Ratio GWide Dynamic Range GCenter Hole for Beam Line GCompact and Lightweight
APPLICATIONS
GScanning Electron Microscopy GScanning Ion Microscopy GElectron Lithography GMask Aligner GElectron Beam Measuring System GIon Scattering Spectroscopy
SPECIFICATIONS
GENERAL
Parameter Assembly Outer Size Effective Area Height (Max.) MCP Channel Diameter Number of MCPs MCP Center Dead Area Value 56.5 27.0 8.6 12 2 8 2 0.5 0.5 3 1.3 x 10-4 +10 to +40 300 10 1.3 x 10-4 1 x 106 20 to 40 7 % of strip current under uniform input into whole MCP effective area 20 Unit mm mm mm m -- mm kV kV kV kV Pa C C Hours Pa -- M / MCP -- pA* cm-2
RATINGS
MCP Supply Voltage (Max.) MCP-Out to Anode Supply Voltage (Max.) Mesh to MCP-In Supply Voltage Anode to Substrate Supply Voltage Operating Vacuum Condition (Max.) Ambient Temperature Baking Temperature Baking Time Vacuum Condition for Baking (Max.) Gain at 1.8 kV (Min.) Plate Resistance Maximum Linear Output Dark Current
TYPICAL ELECTRICAL CHARACTERISTICS (Supply Voltage: 2 kV, Vacuum: 1.3 x 10-4 Pa, Operating Ambient Temperature: +25 C)
Subject to local technical requirements and regulations, availability of products included in this promotional material may vary. Please consult with our sales office. Information furnished by HAMAMATSU is believed to be reliable. However, no responsibility is assumed for possible inaccuracies or omissions. Specifications are subject to change without notice. No patent rights are granted to any of the circuits described herein. (c)2006 Hamamatsu Photonics K.K.
MCP ASSEMBLY F2223-21SH
GAIN CHARACTERISTIC
108
TMCPB0003EA
CONSTRUCTION AND APPLICATION EXAMPLE
ANODE MCP (2-STAGE)
107
MESH 106
SECONDARY ELECTRON ( REFLECTING ELECTRON )
GAIN
SAMPLE
TMCPC0001EA
105
104
103
WIRING POTENTIAL EXAMPLE MESH ................................................ +200 V MCP-IN ............................................. +500 V MCP-OUT ........................................ +2300 V ANODE ............................................ +2400 V CENTER PIPE AND SUBSTRATE ........ GND SAMPLE ................................................ GND
1 1.5 2
SUPPLY VOLTAGE (kV)
* This is an example potential to detect secondary electrons. For other applications, please consult to our sales office.
DIMENSIONAL OUTLINES (Unit: mm)
MESH LEAD 4- 2.6 PCD* 50.8
MCP-IN LEAD (SUS-NM) MCP-OUT LEAD (SUS-NM) ANODE LEAD 4 27
EFFECTIVE AREA
41 56.5
MESH CENTER PIPE (INNER DIA. 4) SUBSTRATE (SUS304) 8
DEAD SPACE
MCP (2-STAGE) 8.6 SINGLE ANODE
* PCD (Pitch Circle Diameter)
TMCPA0002EE
WEB SITE www.hamamatsu.com HAMAMATSU PHOTONICS K.K., Electron Tube Division 314-5, Shimokanzo, Iwata City, Shizuoka Pref., 438-0193, Japan, Telephone: (81)539/62-5248, Fax: (81)539/62-2205
U.S.A.: Hamamatsu Corporation: 360 Foothill Road, P. O. Box 6910, Bridgewater. N.J. 08807-0910, U.S.A., Telephone: (1)908-231-0960, Fax: (1)908-231-1218 E-mail: usa@hamamatsu.com Germany: Hamamatsu Photonics Deutschland GmbH: Arzbergerstr. 10, D-82211 Herrsching am Ammersee, Germany, Telephone: (49)8152-375-0, Fax: (49)8152-2658 E-mail: info@hamamatsu.de France: Hamamatsu Photonics France S.A.R.L.: 19, Rue du Saule Trapu, Parc du Moulin de Massy, 91882 Massy Cedex, France, Telephone: (33)1 69 53 71 00, Fax: (33)1 69 53 71 10 E-mail: infos@hamamatsu.fr United Kingdom: Hamamatsu Photonics UK Limited: 2 Howard Court, 10 Tewin Road Welwyn Garden City Hertfordshire AL7 1BW, United Kingdom, Telephone: 44-(0)1707-294888, Fax: 44(0)1707-325777 E-mail: info@hamamatsu.co.uk North Europe: Hamamatsu Photonics Norden AB: Smidesvagen 12, SE-171-41 SOLNA, Sweden, Telephone: (46)8-509-031-00, Fax: (46)8-509-031-01 E-mail: info@hamamatsu.se TMCP1001E03 Italy: Hamamatsu Photonics Italia: S.R.L.: Strada della Moia, 1/E, 20020 Arese, (Milano), Italy, Telephone: (39)02-935 81 733, Fax: (39)02-935 81 741 E-mail: info@hamamatsu.it
OCT. 2006 IP


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