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MOTOROLA
SEMICONDUCTOR TECHNICAL DATA
Order this document by MPX7100/D
100 kPa High Zin, On-Chip Temperature Compensated & Calibrated Silicon Pressure Sensors
The new MPX7100 series pressure sensor incorporates all the innovative features of Motorola's MPX2000 series family including the patented, single piezoresistive strain gauge (X-ducer) and on-chip temperature compensation and calibration. In addition, the MPX7100 series has a high input impedance of typically 10 k for those portable, low power and battery-operated applications. This device is suitable for those systems in which users must have a dependable, accurate pressure sensor that will not consume significant power. The MPX7100 series device is a logical and economical choice for applications such as portable medical instrumentation, remote sensing systems with 4 - 20 mAmp transmission and field barometers/altimeters. Features * Temperature Compensated Over 0C to +85C * Unique Silicon Shear Stress Strain Gauge * Easy to Use Chip Carrier Package Options * Available in Differential and Gauge Configurations * Ratiometric to Supply Voltage * 0.25% Linearity (MPX7100D) Application Examples * Portable Medical Instrumentation * Field Altimeters * Field Barometers Figure 1 illustrates a schematic of the internal circuitry on the stand-alone pressure sensor chip.
VS 3 THIN FILM TEMPERATURE COMPENSATION AND CALIBRATION CIRCUITRY
MPX7100 SERIES
Motorola Preferred Device
0 to 100 kPa (0 to 14.5 psi) 40 mV FULL SCALE SPAN (TYPICAL)
BASIC CHIP CARRIER ELEMENT CASE 344-15, STYLE 1
DIFFERENTIAL PORT OPTION CASE 344C-01, STYLE 1 NOTE: Pin 1 is the notched pin.
HIGH Zin X-ducer SENSING ELEMENT
2 4
Vout+ Vout-
PIN NUMBER
1 2 Gnd +Vout 3 4 VS -Vout
1 GND
Figure 1. Temperature Compensated Pressure Sensor Schematic VOLTAGE OUTPUT versus APPLIED DIFFERENTIAL PRESSURE The differential voltage output of the X-ducer is directly proportional to the differential pressure applied. The absolute sensor has a built-in reference vacuum. The output voltage will decrease as vacuum, relative to ambient, is drawn on the pressure (P1) side. The output voltage of the differential or gauge sensor increases with increasing pressure applied to the pressure (P1) side relative to the vacuum (P2) side. Similarly, output voltage increases as increasing vacuum is applied to the vacuum (P2) side relative to the pressure (P1) side.
Preferred devices are Motorola recommended choices for future use and best overall value.
Senseon and X-ducer are trademarks of Motorola, Inc. REV 3
Motorola Sensor Device Data (c) Motorola, Inc. 1997
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MPX7100 SERIES
MAXIMUM RATINGS
Rating Overpressure(8) (P1 > P2) Burst Pressure(8) (P1 > P2) Storage Temperature Operating Temperature Symbol Pmax Pburst Tstg TA Value 400 1000 - 40 to +125 - 40 to +125 Unit kPa kPa C C
OPERATING CHARACTERISTICS (VS = 10 Vdc, TA = 25C unless otherwise noted, P1 > P2)
Characteristic Pressure Range(1) Supply Voltage(2) Supply Current Full Scale Span(3) Offset(4) Sensitivity Linearity(5) Pressure Hysteresis(5) (0 to 100 kPa) Temperature Hysteresis(5) (- 40C to +125C) Temperature Effect on Full Scale Span(5) Temperature Effect on Offset(5) Input Impedance Output Impedance Response Time(6) (10% to 90%) Warm-Up Offset Stability(9) MPX7100D MPX7100A MPX7100A, MPX7100D MPX7100D MPX7100A Symbol POP VS Io VFSS Voff V/P -- -- -- -- TCVFSS TCVoff Zin Zout tR -- -- Min 0 -- -- 38.5 -1.0 - 2.0 -- - 0.25 - 1.0 -- -- -1.0 -1.0 5000 2500 -- -- -- Typ -- 10 1.0 40 -- -- 0.4 -- -- 0.1 0.5 -- -- 10,000 3100 1.0 20 0.5 Max 100 16 -- 41.5 1.0 2.0 -- 0.25 1.0 -- -- 1.0 1.0 15,000 6000 -- -- -- Unit kPa Vdc mAdc mV mV mV/kPa %VFSS %VFSS %VFSS %VFSS mV ms ms %VFSS
MECHANICAL CHARACTERISTICS
Characteristic Weight (Basic Element Case 344-15) Common Mode Line Pressure(7) Symbol -- -- Min -- -- Typ 2.0 -- Max -- 690 Unit Grams kPa
NOTES: 1. 1.0 kPa (kiloPascal) equals 0.145 psi. 2. Device is ratiometric within this specified excitation range. Operating the device above the specified excitation range may induce additional error due to device self-heating. 3. Full Scale Span (VFSS) is defined as the algebraic difference between the output voltage at full rated pressure and the output voltage at the minimum rated pressure. 4. Offset (Voff) is defined as the output voltage at the minimum rated pressure. 5. Accuracy (error budget) consists of the following: * Linearity: Output deviation from a straight line relationship with pressure, using end point method, over the specified pressure range. * Temperature Hysteresis: Output deviation at any temperature within the operating temperature range, after the temperature is cycled to and from the minimum or maximum operating temperature points, with zero differential pressure applied. * Pressure Hysteresis: Output deviation at any pressure within the specified range, when this pressure is cycled to and from the minimum or maximum rated pressure, at 25C. * TcSpan: Output deviation at full rated pressure over the temperature range of 0 to 85C, relative to 25C. * TcOffset: Output deviation with minimum rated pressure applied, over the temperature range of 0 to 85C, relative to 25C. 6. Response Time is defined as the time for the incremental change in the output to go from 10% to 90% of its final value when subjected to a specified step change in pressure. 7. Common mode pressures beyond specified may result in leakage at the case-to-lead interface. 8. Exposure beyond these limits may cause permanent damage or degradation to the device. 9. Offset stability is the product's output deviation when subjected to 1000 hours of Pulsed Pressure, Temperature Cycling with Bias Test.
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Motorola Sensor Device Data
MPX7100 SERIES
LINEARITY Linearity refers to how well a transducer's output follows the equation: Vout = Voff + sensitivity x P over the operating pressure range. There are two basic methods for calculating nonlinearity: (1) end point straight line fit (see Figure 2) or (2) a least squares best line fit. While a least squares fit gives the "best case" linearity error (lower numerical value), the calculations required are burdensome. Conversely, an end point fit will give the "worst case" error (often more desirable in error budget calculations) and the calculations are more straightforward for the user. Motorola's specified pressure sensor linearities are based on the end point straight line method measured at the midrange pressure.
LEAST SQUARES FIT RELATIVE VOLTAGE OUTPUT EXAGGERATED PERFORMANCE CURVE LEAST SQUARE DEVIATION
STRAIGHT LINE DEVIATION
END POINT STRAIGHT LINE FIT
OFFSET 0 50 PRESSURE (% FULLSCALE) 100
Figure 2. Linearity Specification Comparison
ON-CHIP TEMPERATURE COMPENSATION and CALIBRATION
Figure 3 shows the output characteristics of the MPX7100 series at 25C. The output is directly proportional to the differential pressure and is essentially a straight line. The effects of temperature on Full Scale Span and Offset are very small and are shown under Operating Characteristics.
40 35 OUTPUT (mVdc) 30 25 20 15 10 5 0 -5
VS = 10 Vdc TA = 25C P1 > P2 MAX
TYP SPAN RANGE (TYP) MIN
kPa PSI
0
25 3.62
50 7.25
75 10.87
100 14.5
OFFSET (TYP)
Figure 3. Output versus Pressure Differential
SILICONE GEL DIE COAT WIRE BOND
WIRE BOND
LEAD FRAME
DIFFERENTIAL/GAUGE ELEMENT P2
DIE BOND
LEAD FRAME
Figure 4. Cross-Sectional Diagrams (Not to Scale)
Figure 4 illustrates the absolute sensing configuration (right) and the differential or gauge configuration in the basic chip carrier (Case 344-15). A silicone gel isolates the die surface and wire bonds from the environment, while allowing the pressure signal to be transmitted to the silicon diaphragm. The MPX7100 series pressure sensor operating charac-
teristics and internal reliability and qualification tests are based on use of dry air as the pressure media. Media other than dry air may have adverse effects on sensor performance and long term reliability. Contact the factory for information regarding media compatibility in your application.
Motorola Sensor Device Data
EEEEEEEEEEE EEEEEEEEEEE EEEEEEEEEEE EEEEEEEEEEE EEEEEEEEEEE
ABSOLUTE ELEMENT P2
DIFFERENTIAL/GAUGE STAINLESS STEEL DIE METAL COVER P1 EPOXY CASE
SILICONE GEL ABSOLUTE DIE COAT DIE P1
STAINLESS STEEL METAL COVER EPOXY CASE
EEEEEEEEEEE EEEEEEEEEEE EEEEEEEEEEE EEEEEEEEEEE EEEEEEEEEEE
DIE BOND
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MPX7100 SERIES
PRESSURE (P1)/VACUUM (P2) SIDE IDENTIFICATION TABLE
Motorola designates the two sides of the pressure sensor as the Pressure (P1) side and the Vacuum (P2) side. The Pressure (P1) side is the side containing the silicone gel which isolates the die from the environment. The differential or gauge sensor is designed to operate with positive differential pressure applied, P1 > P2. The absolute sensor is designed for vacuum applied to P1 side. The Pressure (P1) side may be identified by using the table below:
Part Number MPX7100A MPX7100DP MPX7100AP MPX7100GVP MPX7100AS MPX7100GVS MPX7100ASX MPX7100GVSX MPX7100GSX MPX7100GS MPX7100GP MPX7100D
Case Type 344-15C 344C-01 344B-01 344D-01 344E-01 344A-01 344F-01 344G-01
Pressure (P1) Side Identifier Stainless Steel Cap Side with Part Marking Side with Port Attached Stainless Steel Cap Side with Port Attached Stainless Steel Cap Side with Port Attached Stainless Steel Cap
ORDERING INFORMATION MPX7100 series pressure sensors are available in absolute, differential and gauge configurations. Devices are available in the basic element package or with pressure port fittings which provide printed circuit board mounting ease and barbed hose pressure connections.
MPX Series Device Type DiT Basic Element Ported Elements Options Oi Absolute, Differential Differential, Dual Ported Absolute, Gauge Gauge Vacuum Absolute, Gauge Stove Pipe Gauge Vacuum Stove Pipe Absolute, Gauge Axial Gauge Vacuum Axial Case Type C T Case 344-15 Case 344C-01 Case 344B-01 Case 344D-01 Case 344E-01 Case 344A-01 Case 344F-01 Case 344G-01 Order Number MPX7100A MPX7100D MPX7100DP MPX7100AP MPX7100GP MPX7100GVP MPX7100AS MPX7100GS MPX7100GVS MPX7100ASX MPX7100GSX MPX7100GVSX Device Marking MPX7100A MPX7100D MPX7100DP MPX7100AP MPX7100GP MPX7100GVP MPX7100A MPX7100D MPX7100D MPX7100A MPX7100D MPX7100D
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Motorola Sensor Device Data
MPX7100 SERIES
PACKAGE DIMENSIONS
NOTES:
C R M B -A- N
PIN 1
1 2 3 4
POSITIVE PRESSURE (P1)
1. DIMENSIONING AND TOLERANCING PER ASME Y14.5M, 1994. 2. CONTROLLING DIMENSION: INCH. 3. DIMENSION -A- IS INCLUSIVE OF THE MOLD STOP RING. MOLD STOP RING NOT TO EXCEED 16.00 (0.630). INCHES MIN MAX 0.595 0.630 0.514 0.534 0.200 0.220 0.016 0.020 0.048 0.064 0.100 BSC 0.014 0.016 0.695 0.725 30_ NOM 0.475 0.495 0.430 0.450 MILLIMETERS MIN MAX 15.11 16.00 13.06 13.56 5.08 5.59 0.41 0.51 1.22 1.63 2.54 BSC 0.36 0.40 17.65 18.42 30_ NOM 12.07 12.57 10.92 11.43
L
-T- J
SEATING PLANE POSITIVE PRESSURE (P1)
G F
4 PL
D
0.136 (0.005)
M
TA
M
DIM A B C D F G J L M N R
STYLE 1: PIN 1. 2. 3. 4.
GROUND + OUTPUT + SUPPLY - OUTPUT
CASE 344-15 ISSUE W
PORT #2 VACUUM PRESSURE (P2)
C
POSITIVE PRESSURE (P1) PIN 1
A
NOTES: 1. DIMENSIONING AND TOLERANCING PER ANSI Y14.5M, 1982. 2. CONTROLLING DIMENSION: INCH. DIM A B C D F G J K N R S V INCHES MIN MAX 0.690 0.720 0.245 0.255 0.780 0.820 0.016 0.020 0.048 0.064 0.100 BSC 0.014 0.016 0.345 0.375 0.300 0.310 0.178 0.186 0.220 0.240 0.182 0.194 GROUND + OUTPUT + SUPPLY - OUTPUT MILLIMETERS MIN MAX 17.53 18.28 6.22 6.48 19.81 20.82 0.41 0.51 1.22 1.63 2.54 BSC 0.36 0.41 8.76 9.53 7.62 7.87 4.52 4.72 5.59 6.10 4.62 4.93
-B-
V
12 34
K J R
SEATING PLANE
S G F D 4 PL 0.13 (0.005)
M
N
-T-
TB
M
STYLE 1: PIN 1. 2. 3. 4.
CASE 344A-01 ISSUE B
Motorola Sensor Device Data
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MPX7100 SERIES
PACKAGE DIMENSIONS -- CONTINUED
SEATING PLANE
-T- R H N
PORT #1 POSITIVE PRESSURE (P1)
-A- U L
NOTES: 1. DIMENSIONING AND TOLERANCING PER ANSI Y14.5, 1982. 2. CONTROLLING DIMENSION: INCH. INCHES MIN MAX 1.145 1.175 0.685 0.715 0.305 0.325 0.016 0.020 0.048 0.064 0.100 BSC 0.182 0.194 0.014 0.016 0.695 0.725 0.290 0.300 0.420 0.440 0.153 0.159 0.153 0.159 0.230 0.250 0.220 0.240 0.910 BSC MILLIMETERS MIN MAX 29.08 29.85 17.40 18.16 7.75 8.26 0.41 0.51 1.22 1.63 2.54 BSC 4.62 4.93 0.36 0.41 17.65 18.42 7.37 7.62 10.67 11.18 3.89 4.04 3.89 4.04 5.84 6.35 5.59 6.10 23.11 BSC
-Q-
B
12 34
PIN 1
K S F G D 4 PL 0.13 (0.005)
-P- 0.25 (0.010) J C
M
TQ
S
DIM A B C D F G H J K L N P Q R S U
M
TS
S
Q
S
STYLE 1: PIN 1. 2. 3. 4.
GROUND + OUTPUT + SUPPLY - OUTPUT
CASE 344B-01 ISSUE B
V R
PORT #2 PORT #1
-A- U W H
PORT #2 VACUUM (P2)
L
PORT #1 POSITIVE PRESSURE (P1)
NOTES: 1. DIMENSIONING AND TOLERANCING PER ANSI Y14.5M, 1982. 2. CONTROLLING DIMENSION: INCH. DIM A B C D F G H J K L N P Q R S U V W INCHES MIN MAX 1.145 1.175 0.685 0.715 0.405 0.435 0.016 0.020 0.048 0.064 0.100 BSC 0.182 0.194 0.014 0.016 0.695 0.725 0.290 0.300 0.420 0.440 0.153 0.159 0.153 0.159 0.063 0.083 0.220 0.240 0.910 BSC 0.248 0.278 0.310 0.330 MILLIMETERS MIN MAX 29.08 29.85 17.40 18.16 10.29 11.05 0.41 0.51 1.22 1.63 2.54 BSC 4.62 4.93 0.36 0.41 17.65 18.42 7.37 7.62 10.67 11.18 3.89 4.04 3.89 4.04 1.60 2.11 5.59 6.10 23.11 BSC 6.30 7.06 7.87 8.38
N
-Q-
SEATING PLANE
B
SEATING PLANE PIN 1
1234
-P- -T- J C 0.13 (0.005)
M
K
S
-T-
0.25 (0.010)
M
TQ
S G D 4 PL
F
TS
S
Q
S
STYLE 1: PIN 1. 2. 3. 4.
GROUND + OUTPUT + SUPPLY - OUTPUT
CASE 344C-01 ISSUE B
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Motorola Sensor Device Data
MPX7100 SERIES
PACKAGE DIMENSIONS -- CONTINUED
-A- -T- R N -Q-
SEATING PLANE PORT #2 VACUUM (P2)
U L H
POSITIVE PRESSURE (P1)
NOTES: 1. DIMENSIONING AND TOLERANCING PER ANSI Y14.5, 1982. 2. CONTROLLING DIMENSION: INCH. INCHES MIN MAX 1.145 1.175 0.685 0.715 0.305 0.325 0.016 0.020 0.048 0.064 0.100 BSC 0.182 0.194 0.014 0.016 0.695 0.725 0.290 0.300 0.420 0.440 0.153 0.159 0.153 0.158 0.230 0.250 0.220 0.240 0.910 BSC MILLIMETERS MIN MAX 29.08 29.85 17.40 18.16 7.75 8.26 0.41 0.51 1.22 1.63 2.54 BSC 4.62 4.93 0.36 0.41 17.65 18.42 7.37 7.62 10.67 11.18 3.89 4.04 3.89 4.04 5.84 6.35 5.59 6.10 23.11 BSC
B
12 34
K S
PIN 1
DIM A B C D F G H J K L N P Q R S U
C J -P- 0.25 (0.010)
M
F TQ
S
G D 4 PL 0.13 (0.005)
M
TS
S
Q
S
STYLE 1: PIN 1. 2. 3. 4.
GROUND + OUTPUT + SUPPLY - OUTPUT
CASE 344D-01 ISSUE B
PORT #1 POSITIVE PRESSURE (P1)
C
BACK SIDE VACUUM (P2)
A
NOTES: 1. DIMENSIONING AND TOLERANCING PER ANSI Y14.5M, 1982. 2. CONTROLLING DIMENSION: INCH. DIM A B C D F G J K N R S V INCHES MIN MAX 0.690 0.720 0.245 0.255 0.780 0.820 0.016 0.020 0.048 0.064 0.100 BSC 0.014 0.016 0.345 0.375 0.300 0.310 0.178 0.186 0.220 0.240 0.182 0.194 STYLE 1: PIN 1. 2. 3. 4. MILLIMETERS MIN MAX 17.53 18.28 6.22 6.48 19.81 20.82 0.41 0.51 1.22 1.63 2.54 BSC 0.36 0.41 8.76 9.53 7.62 7.87 4.52 4.72 5.59 6.10 4.62 4.93
-B-
V
43 21 PIN 1
K J R
SEATING PLANE
S G F D 4 PL 0.13 (0.005)
M
N
-T-
TB
M
GROUND + OUTPUT + SUPPLY - OUTPUT
CASE 344E-01 ISSUE B
Motorola Sensor Device Data
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MPX7100 SERIES
PACKAGE DIMENSIONS -- CONTINUED
-T- C E A U -Q-
NOTES: 1. DIMENSIONING AND TOLERANCING PER ANSI Y14.5M, 1982. 2. CONTROLLING DIMENSION: INCH. INCHES MIN MAX 1.080 1.120 0.740 0.760 0.630 0.650 0.016 0.020 0.160 0.180 0.048 0.064 0.100 BSC 0.014 0.016 0.220 0.240 0.070 0.080 0.150 0.160 0.150 0.160 0.440 0.460 0.695 0.725 0.840 0.860 0.182 0.194 MILLIMETERS MIN MAX 27.43 28.45 18.80 19.30 16.00 16.51 0.41 0.51 4.06 4.57 1.22 1.63 2.54 BSC 0.36 0.41 5.59 6.10 1.78 2.03 3.81 4.06 3.81 4.06 11.18 11.68 17.65 18.42 21.34 21.84 4.62 4.92
V
N R
PORT #1 POSITIVE PRESSURE (P1)
B
-P- 0.25 (0.010)
M
PIN 1
TQ
M
4
3
2
1
S K
DIM A B C D E F G J K N P Q R S U V
J
F D 4 PL 0.13 (0.005)
G
STYLE 1: PIN 1. 2. 3. 4. GROUND V (+) OUT V SUPPLY V (-) OUT
M
TP
S
Q
S
CASE 344F-01 ISSUE B
-T- C E
POSITIVE PRESSURE (P1)
A U
-Q-
NOTES: 1. DIMENSIONING AND TOLERANCING PER ANSI Y14.5M, 1982. 2. CONTROLLING DIMENSION: INCH. INCHES MIN MAX 1.080 1.120 0.740 0.760 0.630 0.650 0.016 0.020 0.160 0.180 0.048 0.064 0.100 BSC 0.014 0.016 0.220 0.240 0.070 0.080 0.150 0.160 0.150 0.160 0.440 0.460 0.695 0.725 0.840 0.860 0.182 0.194 MILLIMETERS MIN MAX 27.43 28.45 18.80 19.30 16.00 16.51 0.41 0.51 4.06 4.57 1.22 1.63 2.54 BSC 0.36 0.41 5.59 6.10 1.78 2.03 3.81 4.06 3.81 4.06 11.18 11.68 17.65 18.42 21.34 21.84 4.62 4.92
V
N R
B
PORT #2 VACUUM (P2)
PIN 1
-P- 0.25 (0.010)
M
TQ
M
1
2
3
4
S K
DIM A B C D E F G J K N P Q R S U V
J
F D 4 PL 0.13 (0.005)
G
M
TP
S
Q
S
STYLE 1: PIN 1. 2. 3. 4.
GROUND V (+) OUT V SUPPLY V (-) OUT
CASE 344G-01 ISSUE B
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Motorola Sensor Device Data
MPX7100 SERIES
Motorola reserves the right to make changes without further notice to any products herein. Motorola makes no warranty, representation or guarantee regarding the suitability of its products for any particular purpose, nor does Motorola assume any liability arising out of the application or use of any product or circuit, and specifically disclaims any and all liability, including without limitation consequential or incidental damages. "Typical" parameters which may be provided in Motorola data sheets and/or specifications can and do vary in different applications and actual performance may vary over time. All operating parameters, including "Typicals" must be validated for each customer application by customer's technical experts. Motorola does not convey any license under its patent rights nor the rights of others. Motorola products are not designed, intended, or authorized for use as components in systems intended for surgical implant into the body, or other applications intended to support or sustain life, or for any other application in which the failure of the Motorola product could create a situation where personal injury or death may occur. Should Buyer purchase or use Motorola products for any such unintended or unauthorized application, Buyer shall indemnify and hold Motorola and its officers, employees, subsidiaries, affiliates, and distributors harmless against all claims, costs, damages, and expenses, and reasonable attorney fees arising out of, directly or indirectly, any claim of personal injury or death associated with such unintended or unauthorized use, even if such claim alleges that Motorola was negligent regarding the design or manufacture of the part. Motorola and are registered trademarks of Motorola, Inc. Motorola, Inc. is an Equal Opportunity/Affirmative Action Employer.
Motorola Sensor Device Data
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MPX7100 SERIES
Mfax is a trademark of Motorola, Inc. How to reach us: USA / EUROPE / Locations Not Listed: Motorola Literature Distribution; P.O. Box 5405, Denver, Colorado 80217. 303-675-2140 or 1-800-441-2447 JAPAN: Nippon Motorola Ltd.; Tatsumi-SPD-JLDC, 6F Seibu-Butsuryu-Center, 3-14-2 Tatsumi Koto-Ku, Tokyo 135, Japan. 81-3-3521-8315
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MPX7100/D Motorola Sensor Device Data

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